| Contents: |
Preface to the Second Edition
Preface to the First Edition
Chapter 1 Introduction
1.1 Nature of Vacuum
1.2 Scope of Vacuum Science and Technique
1.3 Uses and Applications of Vacuum Technology
1.4 Production of Vacuum
1.5 Brief History of Development
1.6 History of Vacuum Pumps
References
Chapter 2 Properties of Gases
2.1 Pressure and Density
2.2 Atomic Numbers and Distances
2.3 Basic Gas Law
2.4 Velocities and Temperature of Gases
2.5 Vapors and Vapor Pressure
2.6 Evaporation
2.7 Adsorption and Desorption
2.8 Gas Content of Materials
2.9 Outgassing
2.10 Water Vapor
References
Chapter 3 Fluid Flow and Pumping Concepts
3.1 Pressure and Flow
3.2 Mass Flow and Volume Flow
3.3 Flow Regimes
3.4 Flow Through Nozzles and Diffusers
3.5 Molecular Flow
3.6 Conductance
3.7 Pumping Speed
3.8 Pumps and Compressors
3.9 Fluid Flow in Small Passages
References
Chapter 4 Vacuum Systems
4.1 Vacuum Chamber Design
4.2 Evacuation and Process Gas Pumping
4.3 Evacuation Time
4.4 Ultimate Pressure
4.5 Conductance Calculations
4.6 Outgassing Effects
4.7 Pumping System Design
4.8 Operation of High-Vacuum Systems
4.9 Estimation of Pressure-Time Progress
During Evacuation
References
Chapter 5 Coarse Vacuum Pumps
5.1 Introduction
5.2 Rotary Vane Pumps
5.3 Performance Characteristics
5.4 Ultimate Pressure
5.5 Condensable Vapors and Gas Ballast
5.6 Oils and Backstreaming
5.7 Operation and Maintenance
5.8 Other Coarse Vacuum Pumps
5.9 Oil-Free Vacuum Pumps
References
Chapter 6 Vapor Jet (Diffusion) Pumps
6.1 Introduction
6.2 Pumping Mechanism
6.3 Basic Design
6.4 Basic Performance and Operation
6.5 Pumping Fluids
6.6 Performance Characteristics
6.7 Other Performance Aspects
6.8 Baffles and Traps
6.9 Maintenance
References
Chapter 7 Turbomolecular Pumps
7.1 Introduction
7.2 Molecular Drag Pumps
7.3 Turbomolecular Pumps
7.4 Summary of Properties
References
Chapter 8 Cryogenic Pumps
8.1 Basic Principles of Operation
8.2 Cryosorption Pumping
8.3 Gaseous Helium Cryopumps
8.4 Large Cryopumps
8.5 Water Vapor Pumps
References
Chapter 9 Gettering and Ion Pumping
9.1 Gettering Pumps
9.2 Sputter-ion Pumps
9.3 Basic Performance of Sputter-ion Pumps
9.4 Pump Types and Performance with
Different Gases
9.5 Operation of Ion Pumps
9.6 Nonevaporated Getter (NEG) Pumps
9.7 Combination Pumps
9.8 Clean Roughing Systems
References
Chapter 10 Overloading of Vacuum Pumps
10.1 Introduction
10.2 Volume Flow and Mass Flow
10.3 Cross-over Pressure
10.4 Throughput Limits of Vapor Jet Pumps
10.5 Mass Flow Limits of Turbine-type Pumps
10.6 Similarities Between Pumps
10.7 Cryopumps and Ion-getter Pumps
References
Chapter 11 Ultrahigh Vacuum
11.1 Introduction
11.2 Degassing by Baking
11.3 All-Metal Systems and Components
11.4 Throughput-type Pumps and Ultrahigh
Vacuum
11.5 Capture Pumps
References
Chapter 12 Vacuum Gauges and Gas Analyzers
12.1 Introduction
12.2 Force-measuring Gauges
12.3 Heat Transfer Gauges
12.4 Spinning Rotor Gauges
12.5 Ionization Gauges
12.6 New Trends of Gauges and Sensors
12.7 Mass Spectrometers or Partial Pressure Gauges
References
Chapter 13 Leak Detection
13.1 Introduction
13.2 Sizes of Leaks and Units of
Measurement
13.3 Methods of Leak Detection
13.4 Helium Mass Spectrometer Leak
Detectors
References
Appendix
Index |
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| High-Vacuum Technology, A Practical Guide, 2nd Edition |
| by Marsbed H. Hablanian, 551pp, 1997, ISBN: 0824798341 |
 |
Basic principles for achieving and measuring the high-vacuum conditions required by various metallurgical operations. A must for engineers, technicians, and nontechnical industrial and laboratory personnel who need a practical introduction and overview to all the engineering aspects of high-vacuum technology. Revised edition with updated coverage on turbomolecular pumps, oil-free vacuum pumps, and how to estimate evacuation time. |
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| Contents Include: |
- Introduction
- Properties of Gases
- Fluid Flow and Pumping Concepts
- Vacuum Systems
- Types of Pumps
- Overloading of Pumps
- Ultrahigh Vacuum
- Vacuum Gages and Gas Analyzers
- Leak Detection
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| $180.00 |
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